| Announced Date | Round | Money Raised | Number of Investors | Lead Investors | Post Valuation | |
|---|---|---|---|---|---|---|
| Feb 9, 2021 | Post-IPO Equity | $2B | — | — | — | Detail |
| Jan 6, 2021 | Post-IPO Equity | $1.50B | 1 | SK Group | — | Detail |
| Nov 24, 2020 | Post-IPO Equity | $1B | — | — | — | Detail |
| May 13, 2020 | Post-IPO Equity | $200M | — | — | — | Detail |
| Apr 3, 2019 | Post-IPO Debt | $100M | 1 | Generate Capital | — | Detail |
| Dec 23, 2016 | Post-IPO Debt | $25M | 1 | New York State | — | Detail |
| Jun 28, 2016 | Post-IPO Debt | $70M | 1 | Hercules Capital | — | Detail |
| Apr 22, 2014 | Post-IPO Equity | $116.30M | — | — | — | Detail |
| Mar 6, 2014 | Post-IPO Equity | $21.50M | — | — | — | Detail |
| Jan 10, 2014 | Post-IPO Equity | $30M | — | — | — | Detail |
| Sep 10, 2013 | Post-IPO Equity | $10.50M | — | — | — | Detail |
| May 8, 2013 | Post-IPO Equity | $6.50M | 1 | Air Liquide | — | Detail |
| Mar 29, 2012 | Post-IPO Equity | $2.08M | — | — | — | Detail |
| Mar 22, 2012 | Post-IPO Equity | $13.60M | — | — | — | Detail |
| Aug 9, 2011 | Post-IPO Debt | $7M | 1 | Silicon Valley Bank | — | Detail |
| Jul 5, 2011 | Post-IPO Equity | $20.90M | — | — | — | Detail |
| Jun 13, 2011 | Post-IPO Equity | $20.10M | — | — | — | Detail |
| Jun 29, 2009 | Grant | $0.97M | 1 | — | — | Detail |
| May 4, 2009 | Post-IPO Equity | — | 1 | — | — | Detail |
| Jun 18, 2008 | Grant | $499.85K | 1 | — | — | Detail |
| Nov 19, 2007 | Grant | $315.61K | 1 | — | — | Detail |
| Jun 5, 2007 | Grant | $399.88K | 1 | — | — | Detail |
| Oct 31, 2006 | Grant | $8.60M | 1 | US Department of Energy | — | Detail |
| Oct 10, 2006 | Grant | $406K | 1 | — | — | Detail |
| Jun 29, 2006 | Post-IPO Equity | $217M | 2 | Interros , Norilsk Nickel | — | Detail |
| Jan 12, 2006 | Grant | — | 1 | U.S. Department of Defense | — | Detail |
| Dec 15, 2005 | Grant | — | 1 | International Finance Corporation | — | Detail |
| Sep 2, 2005 | Post-IPO Equity | $6.25M | — | — | — | Detail |
| Jul 6, 2004 | Grant | $499.99K | 1 | — | — | Detail |
| Dec 19, 2003 | Grant | $221.89K | 1 | — | — | Detail |
| Nov 13, 2003 | Post-IPO Equity | $58.50M | — | — | — | Detail |
| Sep 15, 2003 | Grant | $3.90M | 1 | National Institute of Standards and Technology | — | Detail |
| Sep 3, 2002 | Grant | $454.56K | 1 | — | — | Detail |
| Oct 29, 1999 | IPO | $90M | — | — | — | Detail |
| Sep 27, 1999 | Grant | $53.06K | 1 | — | — | Detail |
| Jun 26, 1997 | Grant | $256.57K | 1 | — | — | Detail |